CEI EN 62047-3 : 2007现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE TESTING
出版：Comitato Elettrotecnico Italiano
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基本信息
标准编号： CEI EN 62047-3 : 2007
发布时间：2007/1/1 0:00:00
标准类别：Standard
出版单位：Comitato Elettrotecnico Italiano
标准页数：16
标准简介
Describes the standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 [mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
