UNI EN ISO 14644-2 : 2016现行
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
出版：Ente Nazionale Italiano di Unificazione (UNI)
专家解读视频
基本信息
标准编号： UNI EN ISO 14644-2 : 2016
标准类别：Standard
出版单位：Ente Nazionale Italiano di Unificazione (UNI)
标准页数：0
标准简介
This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
本标准替代的旧标准
