UNI EN ISO 14644-15:2018现行
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
出版：Ente Nazionale Italiano di Unificazione (UNI)
专家解读视频
ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644?8).
ISO 14644-15 : 2017 - Identical
EN ISO 14644-15 : 2017 - Identical
ISO 14644-15 : 2017 - Identical
EN ISO 14644-15 : 2017 - Identical
