DIN 28429 (2003-04)被替代
Vacuum Technology - Acceptance Specifications For Getter Ion Pumps
出版：German Institute for Standardisation (Deutsches Institut für Normung)
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基本信息
标准编号： DIN 28429 (2003-04)
发布时间：2003/4/1 0:00:00
标准类别：Standard
出版单位：German Institute for Standardisation (Deutsches Institut für Normung)
标准页数：12
标准简介
Applies to sputter ion pumps 1) (hereinafter briefly referred to as pumps) with a nominal volume flow rate greater than 10l.s-1 and with the pressure range for the determination of the volume flow rate lying between 1,5.10-5 mbar and 1.10-9 mbar.
标准备注
DRAFT 2013 issued in April 2013. (04/2013)
本标准替代的旧标准
替代本标准的新标准
