ISO/DIS 14644-15 : 60.00 (2017)被替代
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION
出版：International Organization for Standardization
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基本信息
标准编号： ISO/DIS 14644-15 : 60.00 (2017)
标准类别：Standard
出版单位：International Organization for Standardization
标准页数：0
标准简介
Defines requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644-8).
替代本标准的新标准
