DIN EN 62047-1 (2006-10)现行
Semiconductor Devices - Micro-electromechanical Devices - Part 1: Terms And Definitions
出版：German Institute for Standardisation (Deutsches Institut für Normung)
专家解读视频
Describes terms for micro-electromechanical devices including the process of production of such devices.
Supersedes DIN IEC 62047-1. (10/2006) DRAFT 2014 issued in May 2014. (05/2014)
SN EN 62047-1:2006 - Identical
EN 62047-1:2016 - Identical
BS EN 62047-1:2016 - Identical
SN EN 62047-1:2016 - Identical
NBN EN 62047-1:2016 - Identical
BS EN 62047-1:2006 - Identical
NBN EN 62047-1:2007 - Identical
NF EN 62047-1:2006 - Identical
I.S. EN 62047-1:2006 - Identical
IEC 62047-1 Ed. 1.0 - Identical
