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ISO 14644-14:2016现行

Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration

出版：International Organization for Standardization

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基本信息

标准编号： ISO 14644-14:2016

发布时间：2016/9/14 0:00:00

标准类别：Standard

出版单位：International Organization for Standardization

标准页数：21

标准简介

This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.

本标准替代的旧标准

ISO/DIS 14644-14 : 50.60 (2016)

ISO/FDIS 14644-14

等同采用的国际标准

NEN EN ISO 14644-14 : 2016 - Identical

NBN EN ISO 14644-14 : 2016 - Identical

UNI EN ISO 14644-14 : 2016 - Identical

NF EN ISO 14644-14 : 2016 - Identical

DIN EN ISO 14644-14 : 2017 - Identical

PN EN ISO 14644-14 : 2016 - Identical

DIN EN ISO 14644-14 E : 2017 - Identical

I.S. EN ISO 14644-14:2016 - Identical